1cm x 1cm: 1.5cm x 1.5cm, thickness: 300+/-20nm SiO2 / 670+/-20um Si 1inch x 1inch : 3.0cm x 3.0cm, thickness: 300+/-20nm SiO2 / 670+/-20um Si 3cm x 3cm: 3.5cm x 3.5cm, thickness: 300+/-20nm SiO2 / 670+/-20um Si 7cm x 7cm: Diameter: 4inch, thickness: 300+/-20nm SiO2 / 500+/-20um Si DIA: 4inch: Diameter: 4inch, thickness: 300+/-20nm SiO2 / 500+/-20um Si
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